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Description
- Proven performance with semiconductor process equipment, with a wide range of features such as high temperature stability, wide temperature range, failure testing, external signal.
- All models conform to safety standards.
- Conforms to UL and SEMI specifications, CE marking.
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Product Catalog
2D CAD File
Manual
DoC
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| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating liquid |
|---|---|---|---|---|---|
| HRZ | -20 to 40 20 to 90 -20 to 90 |
15kW | ±0.1℃ | Water-cooled refrigeration | Fluorinated liquid, Clear water, Deionized water, Ethylene glycol aqueous solution |





